Phased Array Ionizer
What is TRINC's Phased Array Ionizer？
TRINC has focused attention on the fundamental question of "Why dust adheres to work piece" and analyzed its adherence mechanism. As a result we found out that it was an electrically charged dust (activated dust) that adhered to the work. In other words, the dust adherence could be avoided by eliminating static charges on the dust floating in the space. From this, the TRINC's idea "Room-less Clean Room = Wall-less Clean Room" was born. It embodied an environment where dust was all inactivated not to adhere to anything. A concept of TRINC's Phased Array Ionizer was born.